Fabrication of monodisperse particles by nanoimprinting using anodic porous alumina molds
Monodisperse particles were prepared by nanoimprinting using anodic porous alumina as a mold. The size and shape of the obtained particles could be controlled by changing the geometrical structures of the mold. The process reported here enables the high-throughput preparation of monodisperse particl...
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| Veröffentlicht in: | Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 2014-01, Vol.32 (1) |
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| Hauptverfasser: | , , , |
| Format: | Artikel |
| Sprache: | eng |
| Online-Zugang: | Volltext |
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| Zusammenfassung: | Monodisperse particles were prepared by nanoimprinting using anodic porous alumina as a mold. The size and shape of the obtained particles could be controlled by changing the geometrical structures of the mold. The process reported here enables the high-throughput preparation of monodisperse particles, which are expected to be used in various applications. |
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| ISSN: | 2166-2746 1520-8567 2166-2754 |
| DOI: | 10.1116/1.4837396 |