Directed assembly in epitaxial zinc oxide films on focused ion beam modified sapphire substrates

A new method for directed self-assembly using focused ion beam (FIB) and physical vapor deposition is presented. The high resolution and site-specific patterning capabilities of FIB are coupled with the self-assembly process in heteroepitaxial thin film growth. An efficient FIB-induced damage mechan...

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Veröffentlicht in:	Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena Microelectronics and nanometer structures processing, measurement and phenomena, 2012-01, Vol.30 (1), p.010605-010605-5
Hauptverfasser:	Myers, Benjamin D., Stevens, Blake L., Rożkiewicz, Dorota I., Barnett, Scott A., Dravid, Vinayak P.
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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