Ultrathin TiSiN overcoat protection layer for magnetic media

TiSiN ultrathin films (10–50 Å) deposited by reactive magnetron sputtering from Ti x Si y targets were used as anticorrosion overcoats to protect Co-containing recording media. Films’ growth, structure, composition, resistance against hydrolysis, and anticorrosion performances were studied by spectr...

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Veröffentlicht in:Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films International Journal Devoted to Vacuum, Surfaces, and Films, 2011-09, Vol.29 (5), p.051502-051502-11
Hauptverfasser: Rose, Franck, Marchon, Bruno, Rawat, Vijay, Pocker, Daryl, Xiao, Qi-Fan, Iwasaki, Tomio
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Sprache:eng
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Zusammenfassung:TiSiN ultrathin films (10–50 Å) deposited by reactive magnetron sputtering from Ti x Si y targets were used as anticorrosion overcoats to protect Co-containing recording media. Films’ growth, structure, composition, resistance against hydrolysis, and anticorrosion performances were studied by spectroscopy (x-ray reflectivity and diffraction, ellipsometry, x-ray photoelectron spectroscopy, Fourier transform infrared reflection–absorption spectroscopy) and simulated by molecular dynamics (using modified Tersoff-type interatomic interactions). TiSiN ultrathin overcoats were found to be dense amorphous oxynitrides containing Ti–O–Si linkages. The conversion of SiN x into SiO x by hydrolysis was prevented by introducing less than 20 at. % of Ti in the films. Thanks to the formation of Ti–O–Si linkages which densify the films and reduce oxygen diffusion, good corrosion protection of the magnetic media was achieved down to 28 Å TiSiN overcoat thickness.
ISSN:0734-2101
1553-1813
1520-8559
DOI:10.1116/1.3607423