Analysis of leakage current mechanisms in RuO 2 – TiO 2 – RuO 2 MIM structures

We present an advanced model of current transport in MIM structures and demonstrate its possible utilization in analyzing the leakage current in RuO 2 – TiO 2 – RuO 2 metal-insulator-metal structures. The model comprehends an important role of traps present in high- κ materials in the transport of carriers through the insulator and can provide information about their spatial and energy distribution in the insulator. Through numerical analysis, a significant decrease of defects density in RuO 2 – TiO 2 – RuO 2 MIM structures was identified after annealing at 300 ° C .