Flow of binary gas mixtures through small sampling orifices
Species-dependent density changes in binary gas mixtures flowing through a small thin orifice (thickness ∼ 10 % of diameter) have been studied experimentally using an ion drift tube, covering a limited range of the transition regime from molecular to hydrodynamic flow. The observed density changes a...
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| Veröffentlicht in: | Journal of vacuum science & technology. A, Vacuum, surfaces, and films Vacuum, surfaces, and films, 2011-01, Vol.29 (1), p.011002-011002-6 |
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| Hauptverfasser: | , |
| Format: | Artikel |
| Sprache: | eng |
| Online-Zugang: | Volltext |
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| Zusammenfassung: | Species-dependent density changes in binary gas mixtures flowing through a small thin orifice (thickness
∼
10
%
of diameter) have been studied experimentally using an ion drift tube, covering a limited range of the transition regime from molecular to hydrodynamic flow. The observed density changes are found to depend strongly on the mass ratio of the two flowing gases. A semiempirical formula that estimates the density changes has been derived by fitting the experimental data. |
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| ISSN: | 0734-2101 1520-8559 |
| DOI: | 10.1116/1.3520637 |