Cosputtered composition-spread reproducibility established by high-throughput x-ray fluorescence

Cosputtered composition-spread reproducibility established by high-throughput x-ray fluorescence

We describe the characterization of sputtered yttria-zirconia composition spread thin films by x-ray fluorescence (XRF). We also discuss our automated analysis of the XRF data, which was collected in a high throughput experiment at the Cornell High Energy Synchrotron Source. The results indicate tha...

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Veröffentlicht in:J. Vac. Sci. Technol. A 2010-09, Vol.28 (5), p.1279-1280
Hauptverfasser: Gregoire, John M., Dale, Darren, Kazimirov, Alexander, DiSalvo, Francis J., Bruce van Dover, R.
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Sprache:eng
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catalysis (homogeneous), catalysis (heterogeneous), energy storage (including batteries and capacitors), hydrogen and fuel cells, defects, charge transport, membrane, materials and chemistry by design, synthesis (novel materials), synthesis (self-assembly), synthesis (scalable processing)
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Zusammenfassung:We describe the characterization of sputtered yttria-zirconia composition spread thin films by x-ray fluorescence (XRF). We also discuss our automated analysis of the XRF data, which was collected in a high throughput experiment at the Cornell High Energy Synchrotron Source. The results indicate that both the composition reproducibility of the library deposition and the composition measurements have a precision of better than 1 atomic percent.
ISSN:0734-2101
1520-8559
0734-2101
DOI:10.1116/1.3478668