Development of ion sources from ionic liquids for microfabrication
In this article the authors present the potential of ionic liquid ion sources (ILISs) for direct microfabrication of silicon structures. The authors have developed a specific source geometry using the ionic liquid EMI-BF 4 to obtain stable emission currents up to the 10 μ A regime. ILIS ( EMI-BF 4...
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Veröffentlicht in: | Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena Microelectronics and nanometer structures processing, measurement and phenomena, 2010-05, Vol.28 (3), p.L25-L27 |
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Hauptverfasser: | , , , , , |
Format: | Artikel |
Sprache: | eng |
Online-Zugang: | Volltext |
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Zusammenfassung: | In this article the authors present the potential of ionic liquid ion sources (ILISs) for direct microfabrication of silicon structures. The authors have developed a specific source geometry using the ionic liquid
EMI-BF
4
to obtain stable emission currents up to the
10
μ
A
regime. ILIS
(
EMI-BF
4
)
engraving properties were then investigated. The results and the chemical analysis of the patterned substrates suggest that reactive ion species can be generated from ILIS. This possibility is of major interest to allow decisive advances in the field of focused ion beam applications. |
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ISSN: | 1071-1023 2166-2746 1520-8567 2166-2754 |
DOI: | 10.1116/1.3432125 |