Recommended practice for process sampling for partial pressure analysis

This Recommended Practice describes and recommends various procedures and types of apparatus for obtaining representative samples of process gases from > 10 − 2 Pa ( 10 − 4 Torr ) for partial pressure analysis using a mass spectrometer. The document was prepared by a subcommittee of the Recommended Practices Committee of the American Vacuum Society. The subcommittee was comprised of vacuum users and manufacturers of mass spectrometer partial pressure analyzers who have practical experience in the sampling of process gas atmospheres.