Fabrication of active-matrix high-efficiency electron emission deviceand its application to high-sensitivity image sensing

Practical advantages of an advanced high-efficiency electron emission device (HEED) (low-voltage operation, relatively simple structure, and availability for large-area applications) are further confirmed by its compatibility with active-matrix drive configuration. The fabricated HEED array has been applied to a high-sensitivity image sensing tube with a target of high-gain avalanche rushing amorphous photoconductor (HARP). It is demonstrated that a prototype 256 × 192 pixel active-matrix HEED array operates well as an effective probe for high-resolution image pickup in combination with a HARP target. The advanced HEED array is promising for development of next-generation image sensor with ultrahigh sensitivity and high definition.