Threshold ionization mass spectrometry of reactive species in remote Ar ∕ C 2 H 2 expanding thermal plasma
Triple stage threshold ionization mass spectrometry is successfully implemented in an Ar ∕ C 2 H 2 expanding thermal plasma setup. More than 20 hydrocarbon radicals and molecules formed in the plasma, including for example the C 2 H , C 3 , C 3 H , and C 3 H 2 radicals or C 3 H 4 or C 4 H 2 molecule...
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Veröffentlicht in: | Journal of vacuum science & technology. A, Vacuum, surfaces, and films Vacuum, surfaces, and films, 2005-09, Vol.23 (5), p.1400-1412 |
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Hauptverfasser: | , , , , , |
Format: | Artikel |
Sprache: | eng |
Online-Zugang: | Volltext |
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Zusammenfassung: | Triple stage threshold ionization mass spectrometry is successfully implemented in an
Ar
∕
C
2
H
2
expanding thermal plasma setup. More than 20 hydrocarbon radicals and molecules formed in the plasma, including for example the
C
2
H
,
C
3
,
C
3
H
, and
C
3
H
2
radicals or
C
3
H
4
or
C
4
H
2
molecules, are measured and their absolute densities are determined. Thanks to a careful design, a high sensitivity of the instrument is achieved and species with densities as low as
1
×
10
16
m
−
3
can be detected. Issues related to the absolute density calibration procedure are considered. The proper determination of the background signal by means of a beam chopper and the influence of the chopper on the measurement are discussed and the possible composition distortion of the sampled beam due to the collisions in the sampling orifice is checked. Furthermore, reported values of electron impact ionization cross sections of hydrocarbon species are compared and, based on their similarity in the near threshold energy region, the
C
2
H
2
electron impact ionization cross section is proposed as a reasonable approximation for other hydrocarbon radicals. The results for C, CH, and
C
2
radicals are compared with previous cavity ringdown absorption spectroscopy measurements and a good agreement is obtained. |
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ISSN: | 0734-2101 1520-8559 |
DOI: | 10.1116/1.2006138 |