Thermally Evaporated Iron (Oxide) on an Alumina Barrier Layer, by XPS

We report the XPS characterization of a thermally evaporated iron thin film (6 nm) deposited on an Si/SiO2/Al2O3 substrate using Al Kα x-rays. An XPS survey spectrum, Fe 2p and O 1s narrow scans, and a valence band scan are shown.

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Bibliographische Detailangaben
Veröffentlicht in:	Surface Science Spectra, 20(1):Article No. 49 20(1):Article No. 49, 2013-12, Vol.20 (1), p.49-54
Hauptverfasser:	Madaan, Nitesh, Kanyal, Supriya S., Jensen, David S., Vail, Michael A., Dadson, Andrew E., Engelhard, Mark H., Linford, Matthew R.
Format:	Artikel
Sprache:	eng
Schlagworte:	Environmental Molecular Sciences Laboratory
Online-Zugang:	Volltext
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Beschreibung
Zusammenfassung:	We report the XPS characterization of a thermally evaporated iron thin film (6 nm) deposited on an Si/SiO2/Al2O3 substrate using Al Kα x-rays. An XPS survey spectrum, Fe 2p and O 1s narrow scans, and a valence band scan are shown.
ISSN:	1055-5269 1520-8575
DOI:	10.1116/11.20121104