Strong texturing and van der Waals transferability of Mo/Al0.65Sc0.35N/Mo films on 2D-MoS2 monolayers

Van der Waals epitaxy and transfer of functional layers are crucial technologies for achieving monolithic 3D integration in advanced electronics. Two-dimensional transition metal dichalcogenides, such as 2D-MoS2, exhibit strong growth texturing effects and excellent van der Waals transferability for metal and semiconductor layers deposited on top of them. In this study, we demonstrate strong texturing and layer transferability of piezoelectric Al0.65Sc0.35N layers when utilizing Mo seed layers on 2D-MoS2. With the presence of 2D-MoS2, we achieve textured growth of Al0.65Sc0.35N layers with thinner seed layers and lower piezoelectric thicknesses. Furthermore, these deposited stacks can be easily peeled off from their growth substrates through conventional layer transfer techniques, making them highly suitable for vertical integration of functional layers.