Compact superconducting transmon qubit circuits made of ultrathin NbN

We design and fabricate a compact superconducting qubit circuit made of nano-thick NbN film on a high-resistivity silicon substrate, carrying seven transmon qubits. By comparing with the conventional superconducting qubit circuits made of superconducting films with hundred-nanometer thickness, our superconducting qubit circuit has much smaller size in the readout circuit, whose resonator length is only about 1/20 of that in a conventional superconducting circuit. Transmons are measured and characterized in the frequency and time domains with different flux bias. The transition frequency f01 can be adjusted in the range of several GHz. The qubit circuits made of such nano-thick material with high kinetic inductance are promising in the integration of quantum circuits.