Synthesis of β–SiAlON by plasma chemical sintering based on AlN and Si3N4 components

This article presents a method for obtaining sialon-containing phases using the energy of low-temperature plasma. The results of the temperature effect of the plasma beam on AlN+Si3N4 powder mixtures are presented. The effect of plasma flows on a synthesized sample inside a plasma-chemical reactor i...

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Hauptverfasser: Bezukhov, Konstantin, Vlasov, Victor, Klopotov, Anatolii, Volokitin, Gennadiy, Sarkisov, Yuriy, Golobokov, Nikolay, Kakushkin, Yuriy
Format: Tagungsbericht
Sprache:eng
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Zusammenfassung:This article presents a method for obtaining sialon-containing phases using the energy of low-temperature plasma. The results of the temperature effect of the plasma beam on AlN+Si3N4 powder mixtures are presented. The effect of plasma flows on a synthesized sample inside a plasma-chemical reactor is considered. It is shown that in the course of high-temperature synthesis, a lamellar material is formed, condensed on the walls of the reactor with the formation of the Al2SiO5 phase. An experimental study of various areas exposed to high-temperature exposure was carried out. Under the direct action of the plasma beam, SiAlON with the composition Si5AlON7 is formed.
ISSN:0094-243X
1551-7616
DOI:10.1063/5.0162880