Synthesis gas sensor from compound Sb2O3:In2O3 by spin coating method

Thin films from Sb2O3:In2O3 Prepare membranes of different weights, then prepare membranes using a sipn coating method with the rotation speed are (2000,3000,4000,5000,6000) rpm respectively and the rotation time is 7s. The films were examined as gas sensor against NH3gas at operating temperatures (130) oC, also sensitivity of films for gases decreases with increases temperature. The variation of the operating temperature of the films have led to a significant changes in sensor sensitivity. The gas sensor at the operating temperature of an to increasing in response time and decreasing in recovery.