Effect of electrically induced cracks on the properties of PZT thin film capacitors

We present a study of the effect of electrically induced cracks on both the ferroelectric and piezoelectric properties of Pt/PbZr0.52Ti0.48O3 (PZT)/Pt capacitors and correlations with domain structures of PZT films. Above a threshold bipolar electric field, cracks appear inside the PZT layer thickne...

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Veröffentlicht in:	Applied physics letters 2022-12, Vol.121 (23)
Hauptverfasser:	Kuentz, Hugo, Wagué, Baba, Vaxelaire, Nicolas, Demange, Valérie, Poulain, Christophe, Guilloux-Viry, Maryline, Le Rhun, Gwenael
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied physics Capacitors Chemical Sciences Cracks Domains Electric fields Ferroelectric materials Ferroelectricity Lead zirconate titanates Piezoelectricity Polarization Thickness Thin films
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