Effect of electrically induced cracks on the properties of PZT thin film capacitors

We present a study of the effect of electrically induced cracks on both the ferroelectric and piezoelectric properties of Pt/PbZr0.52Ti0.48O3 (PZT)/Pt capacitors and correlations with domain structures of PZT films. Above a threshold bipolar electric field, cracks appear inside the PZT layer thickne...

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Veröffentlicht in:Applied physics letters 2022-12, Vol.121 (23)
Hauptverfasser: Kuentz, Hugo, Wagué, Baba, Vaxelaire, Nicolas, Demange, Valérie, Poulain, Christophe, Guilloux-Viry, Maryline, Le Rhun, Gwenael
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Sprache:eng
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Zusammenfassung:We present a study of the effect of electrically induced cracks on both the ferroelectric and piezoelectric properties of Pt/PbZr0.52Ti0.48O3 (PZT)/Pt capacitors and correlations with domain structures of PZT films. Above a threshold bipolar electric field, cracks appear inside the PZT layer thickness leading to an increase in the ferroelectric polarization (+50% for the remnant polarization, from 16 to 25 μC/cm2) and the longitudinal piezoelectric coefficient d33,f (from ∼150 to ∼220 pm/V). The use of x-ray diffraction during in situ biasing provides direct evidence for a modification of the PZT crystalline structure as well as the a/c domain configuration. After cracking, the fraction of c-domains is strongly increased, thus contributing to higher polarization and larger strain in the out-of-plane direction.
ISSN:0003-6951
1077-3118
DOI:10.1063/5.0127111