Modeling of sensitive elements of capacitive measuring transducers taking into account the influence of the edge electrostatic effect

Capacitive sensors are very attractive for various fields of science and technology. This is due to such advantages as minimal power consumption, high sensitivity, increased noise immunity, etc. On the other hand, these advantages can be achieved by precision machining of the sensor parts. In addition, when developing capacitive sensors, it is necessary to take into account and compensate for their specific phenomena. In particular, such problems include edge electrostatic effects, which can reduce the temporal and parametric stability of the sensors