Erratum: “The effects of match circuit on the breakdown process of capacitively coupled plasma driven by radio frequency” [J. Appl. Phys. 131, 153301 (2022)]

Erratum: “The effects of match circuit on the breakdown process of capacitively coupled plasma driven by radio frequency” [J. Appl. Phys. 131, 153301 (2022)]

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Veröffentlicht in:Journal of applied physics 2022-05, Vol.131 (20)
Hauptverfasser: Wu, Hao, Chen, Zhaoyu, Yu, Shimin, Wang, Qixuan, Li, Xiandi, Jiang, Wei, Zhang, Ya
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container_issue 20
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container_title Journal of applied physics
container_volume 131
creator Wu, Hao
Chen, Zhaoyu
Yu, Shimin
Wang, Qixuan
Li, Xiandi
Jiang, Wei
Zhang, Ya
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doi_str_mv 10.1063/5.0096580
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title Erratum: “The effects of match circuit on the breakdown process of capacitively coupled plasma driven by radio frequency” [J. Appl. Phys. 131, 153301 (2022)]
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