Determination of the basic parameters of the stage molecular vacuum pump by the Monte-Carlo method

Determination of the basic parameters of the stage molecular vacuum pump by the Monte-Carlo method

As part of the study, the problem of determining the molecular stage basic parameters of a combined turbomolecular vacuum pump is solved. The stage is formed by a smooth rotor disk and a stator with spiral channels. The influence of the gap between the rotor and the stator is taken into account. To...

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Hauptverfasser: Ivanov, D. G., Svichkar, E. V., Klycharov, V. S., Nikulin, N. K., Shemarov, O. A., Kemenov, V. N., Degtyareva, T. S.
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Monte Carlo simulation
Parameters
Rotors
Stators
Vacuum pumps
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creator Ivanov, D. G.
Svichkar, E. V.
Klycharov, V. S.
Nikulin, N. K.
Shemarov, O. A.
Kemenov, V. N.
Degtyareva, T. S.
description As part of the study, the problem of determining the molecular stage basic parameters of a combined turbomolecular vacuum pump is solved. The stage is formed by a smooth rotor disk and a stator with spiral channels. The influence of the gap between the rotor and the stator is taken into account. To solve this problem, the Monte Carlo method was used. As a result, we obtained dependences graphs Smax and τmax of the stage on a number of parameters.
doi_str_mv 10.1063/5.0029128
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subjects Monte Carlo simulation
Parameters
Rotors
Stators
Vacuum pumps
title Determination of the basic parameters of the stage molecular vacuum pump by the Monte-Carlo method
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