Determination of the basic parameters of the stage molecular vacuum pump by the Monte-Carlo method

Determination of the basic parameters of the stage molecular vacuum pump by the Monte-Carlo method

As part of the study, the problem of determining the molecular stage basic parameters of a combined turbomolecular vacuum pump is solved. The stage is formed by a smooth rotor disk and a stator with spiral channels. The influence of the gap between the rotor and the stator is taken into account. To...

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Bibliographische Detailangaben
Hauptverfasser: Ivanov, D. G., Svichkar, E. V., Klycharov, V. S., Nikulin, N. K., Shemarov, O. A., Kemenov, V. N., Degtyareva, T. S.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Monte Carlo simulation
Parameters
Rotors
Stators
Vacuum pumps
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Beschreibung
Zusammenfassung:As part of the study, the problem of determining the molecular stage basic parameters of a combined turbomolecular vacuum pump is solved. The stage is formed by a smooth rotor disk and a stator with spiral channels. The influence of the gap between the rotor and the stator is taken into account. To solve this problem, the Monte Carlo method was used. As a result, we obtained dependences graphs Smax and τmax of the stage on a number of parameters.
ISSN:0094-243X
1551-7616
DOI:10.1063/5.0029128