A highly efficient nanofocusing system for soft x rays

The focusing of x rays is essential in various types of x-ray microscopy because the size and flux of the illuminating beam determine the spatial resolution and signal intensity, respectively. A system with grazing incidence mirrors allows highly efficient x ray focusing with beam dimensions on the...

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Veröffentlicht in:Applied physics letters 2020-10, Vol.117 (15)
Hauptverfasser: Takeo, Yoko, Motoyama, Hiroto, Shimamura, Takenori, Kimura, Takashi, Kume, Takehiro, Matsuzawa, Yusuke, Saito, Takahiro, Imamura, Yoichi, Miyashita, Hiroaki, Hiraguri, Kentaro, Hashizume, Hirokazu, Senba, Yasunori, Kishimoto, Hikaru, Ohashi, Haruhiko, Mimura, Hidekazu
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Sprache:eng
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Zusammenfassung:The focusing of x rays is essential in various types of x-ray microscopy because the size and flux of the illuminating beam determine the spatial resolution and signal intensity, respectively. A system with grazing incidence mirrors allows highly efficient x ray focusing with beam dimensions on the nanometer scale. Tube-shaped mirrors with a large numerical aperture and high demagnification, including ellipsoidal mirrors and Wolter mirrors, have recently been developed for soft x-ray nanofocusing. However, these mirrors have low efficiency because they cannot focus the central part of the illumination beam. Here, we propose a two-stage focusing system, in which a ring-shaped beam formed by a ring-focusing mirror illuminates a quasi-Wolter mirror. A prototype of the system is experimentally constructed at beamline BL25SU-A of SPring-8. Observation of the wavefront error based on ptychography enables efficient alignment of the two mirrors. Using this alignment procedure, we achieve a spot size of less than 200 nm at 300 eV.
ISSN:0003-6951
1077-3118
DOI:10.1063/5.0027118