Overview of microfabricated bolometers with vertically aligned carbon nanotube absorbers
Multi-wall vertically aligned carbon nanotubes (VACNTs) are nearly ideal absorbers due to their exceptionally low reflectance over a broad wavelength range. Integrating VACNTs as bolometer absorbers, however, can be difficult due to their high growth temperature and fragile nature. Despite these cha...
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Veröffentlicht in: | AIP advances 2020-05, Vol.10 (5), p.055010-055010-10 |
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Sprache: | eng |
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Zusammenfassung: | Multi-wall vertically aligned carbon nanotubes (VACNTs) are nearly ideal absorbers due to
their exceptionally low reflectance over a broad wavelength range. Integrating VACNTs as
bolometer absorbers, however, can be difficult due to their high growth temperature and
fragile nature. Despite these challenges, we have microfabricated many different types of
VACNT bolometers, ranging from cryogenic optical power primary standards to room
temperature satellite-based solar irradiance monitors and broadband infrared
microbolometers. Advantages our VACNT bolometers provide over the bolometers they replace
vary by application, but can be reduced size and time constant, increased absorption,
and/or microfabrication instead of hand assembly. Depending on the application and
operating conditions, our VACNT bolometers are designed with a variety of thermistors and
weak thermal links. The thermistors used include commercial surface mount chips,
superconducting transition-edge sensors, and vanadium oxide
(VOx). Weak thermal links include silicon nitride
(SiNx) membranes, Si bridges, and laser-cut polyimide. We
summarize a wide variety of microfabricated bolometers with VACNT absorbers that measure
optical power levels spanning over seven orders of magnitude. |
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ISSN: | 2158-3226 2158-3226 |
DOI: | 10.1063/5.0004025 |