Silicon photodetector for integrated lithium niobate photonics

We demonstrate the integration of an amorphous silicon photodetector with a thin film lithium niobate photonic platform operating in the visible wavelength range. We present the details of the design, fabrication, integration, and experimental characterization of this metal-semiconductor-metal photo...

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Veröffentlicht in:Applied physics letters 2019-09, Vol.115 (12)
Hauptverfasser: Desiatov, Boris, Lončar, Marko
Format: Artikel
Sprache:eng
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Zusammenfassung:We demonstrate the integration of an amorphous silicon photodetector with a thin film lithium niobate photonic platform operating in the visible wavelength range. We present the details of the design, fabrication, integration, and experimental characterization of this metal-semiconductor-metal photodetector that features a responsivity of 22 mA/W to 37 mA/W over the wide optical bandwidth spanning in the 635 nm–850 nm wavelength range.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.5118901