Mathematical modeling of the Fabry–Pérot interferometer based on silicon plates for application in microfluid devices

Mathematical modeling of the Fabry–Pérot interferometer based on silicon plates for application in microfluid devices

Mathematical modeling of 4-x mirror Fabry - Perot interferometer was made in order to use as a sensor for determining the refractive index of a liquid. After comparing different materials, silicon was chosen as the main one. The properties of silicon wafers significantly expand the functions and cap...

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Hauptverfasser: Pleshanov, Ilya M., Sherimov, Daniyar, Belorus, Anton O.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Computer simulation
Fabry-Perot interferometers
Mathematical analysis
Mathematical models
Refractivity
Silicon
Silicon wafers
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Beschreibung
Zusammenfassung:Mathematical modeling of 4-x mirror Fabry - Perot interferometer was made in order to use as a sensor for determining the refractive index of a liquid. After comparing different materials, silicon was chosen as the main one. The properties of silicon wafers significantly expand the functions and capabilities of the sensor and. As a result of the simulation, sensitivity up to 1600 nm / RU was obtained.
ISSN:0094-243X
1551-7616
DOI:10.1063/1.5087373