Digitally controlled analog proportional-integral-derivative (PID) controller for high-speed scanning probe microscopy

Nearly all scanning probe microscopes (SPMs) contain a feedback controller, which is used to move the scanner in the direction of the z-axis in order to maintain a constant setpoint based on the tip-sample interaction. The most frequently used feedback controller in SPMs is the proportional-integral...

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Veröffentlicht in:Review of scientific instruments 2017-12, Vol.88 (12), p.123712-123712
Hauptverfasser: Dukic, Maja, Todorov, Vencislav, Andany, Santiago, Nievergelt, Adrian P., Yang, Chen, Hosseini, Nahid, Fantner, Georg E.
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container_end_page 123712
container_issue 12
container_start_page 123712
container_title Review of scientific instruments
container_volume 88
creator Dukic, Maja
Todorov, Vencislav
Andany, Santiago
Nievergelt, Adrian P.
Yang, Chen
Hosseini, Nahid
Fantner, Georg E.
description Nearly all scanning probe microscopes (SPMs) contain a feedback controller, which is used to move the scanner in the direction of the z-axis in order to maintain a constant setpoint based on the tip-sample interaction. The most frequently used feedback controller in SPMs is the proportional-integral (PI) controller. The bandwidth of the PI controller presents one of the speed limiting factors in high-speed SPMs, where higher bandwidths enable faster scanning speeds and higher imaging resolution. Most SPM systems use digital signal processor-based PI feedback controllers, which require analog-to-digital and digital-to-analog converters. These converters introduce additional feedback delays which limit the achievable imaging speed and resolution. In this paper, we present a digitally controlled analog proportional-integral-derivative (PID) controller. The controller implementation allows tunability of the PID gains over a large amplification and frequency range, while also providing precise control of the system and reproducibility of the gain parameters. By using the analog PID controller, we were able to perform successful atomic force microscopy imaging of a standard silicon calibration grating at line rates up to several kHz.
doi_str_mv 10.1063/1.5010181
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title Digitally controlled analog proportional-integral-derivative (PID) controller for high-speed scanning probe microscopy
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