Digitally controlled analog proportional-integral-derivative (PID) controller for high-speed scanning probe microscopy
Nearly all scanning probe microscopes (SPMs) contain a feedback controller, which is used to move the scanner in the direction of the z-axis in order to maintain a constant setpoint based on the tip-sample interaction. The most frequently used feedback controller in SPMs is the proportional-integral...
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Veröffentlicht in: | Review of scientific instruments 2017-12, Vol.88 (12), p.123712-123712 |
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Format: | Artikel |
Sprache: | eng |
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Zusammenfassung: | Nearly all scanning probe microscopes (SPMs) contain a feedback controller, which is used
to move the scanner in the direction of the z-axis in order to maintain a constant
setpoint based on the tip-sample interaction. The most frequently used feedback controller
in SPMs is the proportional-integral (PI) controller. The bandwidth of the PI controller
presents one of the speed limiting factors in high-speed SPMs, where higher bandwidths
enable faster scanning speeds and higher imaging resolution. Most SPM systems use digital
signal processor-based PI feedback controllers, which require analog-to-digital and
digital-to-analog converters. These converters introduce additional feedback delays which
limit the achievable imaging speed and resolution. In this paper, we present a digitally
controlled analog proportional-integral-derivative (PID) controller. The controller
implementation allows tunability of the PID gains over a large amplification and frequency
range, while also providing precise control of the system and reproducibility of the gain
parameters. By using the analog PID controller, we were able to perform successful atomic
force microscopy imaging of a standard silicon calibration grating at line rates up to
several kHz. |
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ISSN: | 0034-6748 1089-7623 |
DOI: | 10.1063/1.5010181 |