Deviations from Vegard's law in semiconductor thin films measured with X-ray diffraction and Rutherford backscattering: The Ge1- y Sn y and Ge1- x Si x cases
The compositional dependence of the lattice parameter in Ge1- y Sn y alloys has been determined from combined X-ray diffraction and Rutherford Backscattering (RBS) measurements of a large set of epitaxial films with compositions in the 0
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Veröffentlicht in: | Journal of applied physics 2017-09, Vol.122 (12) |
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Hauptverfasser: | , , , , |
Format: | Artikel |
Sprache: | eng |
Online-Zugang: | Volltext |
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Zusammenfassung: | The compositional dependence of the lattice parameter in Ge1-
y
Sn
y
alloys has been determined from combined X-ray diffraction and Rutherford Backscattering (RBS) measurements of a large set of epitaxial films with compositions in the 0 |
---|---|
ISSN: | 0021-8979 1089-7550 |
DOI: | 10.1063/1.4996306 |