Effect of gas mixing on physical properties of warm collisional helicon plasmas

The effect of inert gas mixing on the physical properties of a helicon plasma source with a Nagoya type III antenna is analytically investigated by taking into account the thermal and collisional effects. The dielectric permittivity tensor of this mixed gas plasma is obtained by using the Bhatnagar–Gross– Krook kinetic theory. Considering the dielectric tensor of mixed gas plasma and solving the electromagnetic field equations, the profiles of electromagnetic fields and plasma resistance are plotted and discussed. The results show that the plasma resistance peaks decrease with increasing Xe fraction in Ar–Xe plasma, and increase with the He fraction in Ar–He plasma. It is also shown that by increasing the xenon filling fraction, the electromagnetic field amplitudes are lowered, and by increasing the helium filling fraction, they are increased.