Simple experiment on the sputtering rate of solids in gas discharges

We present a very simple and sensitive method to measure the sputtering rate of solid materials in stationary low-pressure gas discharges. The method is based on the balance of the centrifugal force and the confinement electric force acting on a single electrically charged dust particle in a rotatin...

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Bibliographische Detailangaben

Veröffentlicht in:	Physics of plasmas 2017-06, Vol.24 (6)
Hauptverfasser:	Hartmann, Peter, Reyes, Jorge C., Korolov, Ihor, Matthews, Lorin S., Hyde, Truell W.
Format:	Artikel
Sprache:	eng
Schlagworte:	Dust Gas discharges Low pressure gases Rotating environments
Online-Zugang:	Volltext
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