Simple experiment on the sputtering rate of solids in gas discharges

We present a very simple and sensitive method to measure the sputtering rate of solid materials in stationary low-pressure gas discharges. The method is based on the balance of the centrifugal force and the confinement electric force acting on a single electrically charged dust particle in a rotatin...

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Veröffentlicht in:Physics of plasmas 2017-06, Vol.24 (6)
Hauptverfasser: Hartmann, Peter, Reyes, Jorge C., Korolov, Ihor, Matthews, Lorin S., Hyde, Truell W.
Format: Artikel
Sprache:eng
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Zusammenfassung:We present a very simple and sensitive method to measure the sputtering rate of solid materials in stationary low-pressure gas discharges. The method is based on the balance of the centrifugal force and the confinement electric force acting on a single electrically charged dust particle in a rotating environment. We demonstrate the use and sensitivity of this method in a capacitively coupled radio frequency argon discharge. We were able to detect a reduction of 10 nm in the diameter of a single dust particle.
ISSN:1070-664X
1089-7674
DOI:10.1063/1.4985080