Simple experiment on the sputtering rate of solids in gas discharges
We present a very simple and sensitive method to measure the sputtering rate of solid materials in stationary low-pressure gas discharges. The method is based on the balance of the centrifugal force and the confinement electric force acting on a single electrically charged dust particle in a rotatin...
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Veröffentlicht in: | Physics of plasmas 2017-06, Vol.24 (6) |
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Hauptverfasser: | , , , , |
Format: | Artikel |
Sprache: | eng |
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Online-Zugang: | Volltext |
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Zusammenfassung: | We present a very simple and sensitive method to measure the
sputtering rate
of solid materials in stationary low-pressure gas discharges. The method is based on the balance of the
centrifugal force and the confinement electric force acting on a single electrically
charged dust
particle in a rotating environment. We demonstrate the use and
sensitivity of this method in a capacitively coupled radio frequency argon discharge. We were able to
detect a reduction of 10 nm in the diameter of a single dust particle. |
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ISSN: | 1070-664X 1089-7674 |
DOI: | 10.1063/1.4985080 |