Simple experiment on the sputtering rate of solids in gas discharges

Simple experiment on the sputtering rate of solids in gas discharges

We present a very simple and sensitive method to measure the sputtering rate of solid materials in stationary low-pressure gas discharges. The method is based on the balance of the centrifugal force and the confinement electric force acting on a single electrically charged dust particle in a rotatin...

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Veröffentlicht in:Physics of plasmas 2017-06, Vol.24 (6)
Hauptverfasser: Hartmann, Peter, Reyes, Jorge C., Korolov, Ihor, Matthews, Lorin S., Hyde, Truell W.
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Sprache:eng
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Dust
Gas discharges
Low pressure gases
Rotating environments
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creator Hartmann, Peter
Reyes, Jorge C.
Korolov, Ihor
Matthews, Lorin S.
Hyde, Truell W.
description We present a very simple and sensitive method to measure the sputtering rate of solid materials in stationary low-pressure gas discharges. The method is based on the balance of the centrifugal force and the confinement electric force acting on a single electrically charged dust particle in a rotating environment. We demonstrate the use and sensitivity of this method in a capacitively coupled radio frequency argon discharge. We were able to detect a reduction of 10 nm in the diameter of a single dust particle.
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subjects Dust
Gas discharges
Low pressure gases
Rotating environments
title Simple experiment on the sputtering rate of solids in gas discharges
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