Electron energy distribution functions and fractional power transfer in “cold” and excited CO2 discharge and post discharge conditions

A Boltzmann equation, in the presence of superelastic vibrational and electronic collisions and of electron-electron Coulomb collisions, has been solved in CO2 plasma in discharge and post discharge conditions. Superelastic vibrational collisions play an important role in affecting the electron energy distribution function (eedf) in a wide range of the reduced electric field E/N and of vibrational temperatures characterizing the vibrational modes of CO2. An important result is the dependence of fractional power losses and of the relevant rate coefficients on the vibrational temperatures of the system. Superelastic electronic collisions, on the other hand, are the main processes affecting eedf and related quantities in the post discharge conditions (i.e., E/N = 0). In particular at low vibrational temperatures, the superelastic electronic collisions form an important plateau in the eedf, largely influencing the rate coefficients and the fractional power transfer.