Recent progress of hard x-ray imaging microscopy and microtomography at BL37XU of SPring-8

A hard x-ray imaging microscopy and microtomography system is now being developed at the beamline 37XU of SPring-8. In the latest improvement, a spatial resolution of about 50 nm is achieved in two-dimensional imaging at 6 keV x-ray energy using a Fresnel zone plate objective with an outermost zone...

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Veröffentlicht in:AIP conference proceedings 2016-01, Vol.1696 (1)
Hauptverfasser: Suzuki, Yoshio, Takeuchi, Akihisa, Terada, Yasuko, Uesugi, Kentaro, Mizutani, Ryuta
Format: Artikel
Sprache:eng
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Zusammenfassung:A hard x-ray imaging microscopy and microtomography system is now being developed at the beamline 37XU of SPring-8. In the latest improvement, a spatial resolution of about 50 nm is achieved in two-dimensional imaging at 6 keV x-ray energy using a Fresnel zone plate objective with an outermost zone width of 35 nm. In the tomographic measurement, a spatial resolution of about 100 nm is achieved at 8 keV using an x-ray guide tube condenser optic and a Fresnel zone plate objective with an outermost zone width of 50 nm.
ISSN:0094-243X
1551-7616
DOI:10.1063/1.4937507