Tandem array of nanoelectronic readers embedded coplanar to a fluidic nanochannel for correlated single biopolymer analysis

We have developed a two-step electron-beam lithography process to fabricate a tandem array of three pairs of tip-like gold nanoelectronic detectors with electrode gap size as small as 9 nm, embedded in a coplanar fashion to 60 nm deep, 100 nm wide, and up to 150 μm long nanochannels coupled to a wor...

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Veröffentlicht in:Biomicrofluidics 2014-01, Vol.8 (1), p.016501-016501
Hauptverfasser: Lesser-Rojas, Leonardo, Sriram, K. K., Liao, Kuo-Tang, Lai, Shui-Chin, Kuo, Pai-Chia, Chu, Ming-Lee, Chou, Chia-Fu
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Sprache:eng
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Zusammenfassung:We have developed a two-step electron-beam lithography process to fabricate a tandem array of three pairs of tip-like gold nanoelectronic detectors with electrode gap size as small as 9 nm, embedded in a coplanar fashion to 60 nm deep, 100 nm wide, and up to 150 μm long nanochannels coupled to a world-micro-nanofluidic interface for easy sample introduction. Experimental tests with a sealed device using DNA-protein complexes demonstrate the coplanarity of the nanoelectrodes to the nanochannel surface. Further, this device could improve transverse current detection by correlated time-of-flight measurements of translocating samples, and serve as an autocalibrated velocimeter and nanoscale tandem Coulter counters for single molecule analysis of heterogeneous samples.
ISSN:1932-1058
1932-1058
DOI:10.1063/1.4861435