Theoretical discussion for electron-density distribution in multicuspion source

By introducing some ideas of magnetohydrodynamics (MHD) and kinetic theories, some useful solutions for electron-density distribution in the radial direction in multicusp ion source are obtained. Therefore, some conclusions are made in this perspective: 1, the electron-density distributions in a spe...

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Veröffentlicht in:Applied physics letters 2011-03, Vol.98 (12), p.121501-121501-3
Hauptverfasser: Zhan, Hualin, Hu, Chundong, Xie, Yahong, Wu, Bin, Wang, Jinfang, Liang, Lizheng, Wei, Jianglong
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Zusammenfassung:By introducing some ideas of magnetohydrodynamics (MHD) and kinetic theories, some useful solutions for electron-density distribution in the radial direction in multicusp ion source are obtained. Therefore, some conclusions are made in this perspective: 1, the electron-density distributions in a specific region in the sheath are the same with or without magnetic field; 2, the influence of magnetic field on the electron density obeys exponential law, which should take into account the collision term as well if the magnetic field is strong; 3, the result derived from the Boltzmann equation is qualitatively consistent with some given experimental results.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.3571292