Theoretical discussion for electron-density distribution in multicuspion source
By introducing some ideas of magnetohydrodynamics (MHD) and kinetic theories, some useful solutions for electron-density distribution in the radial direction in multicusp ion source are obtained. Therefore, some conclusions are made in this perspective: 1, the electron-density distributions in a spe...
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Veröffentlicht in: | Applied physics letters 2011-03, Vol.98 (12), p.121501-121501-3 |
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Zusammenfassung: | By introducing some ideas of magnetohydrodynamics (MHD) and kinetic theories, some useful solutions for electron-density distribution in the radial direction in multicusp ion source are obtained. Therefore, some conclusions are made in this perspective: 1, the electron-density distributions in a specific region in the sheath are the same with or without magnetic field; 2, the influence of magnetic field on the electron density obeys exponential law, which should take into account the collision term as well if the magnetic field is strong; 3, the result derived from the Boltzmann equation is qualitatively consistent with some given experimental results. |
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ISSN: | 0003-6951 1077-3118 |
DOI: | 10.1063/1.3571292 |