Electroluminescence from amorphous- SiN x : H / SiO 2 multilayers using lateral carrier injection

We report the observation of photoluminescence and electroluminescence from amorphous- SiN x : H / SiO 2 multilayer structures. An effective method of current injection has been implemented for electrical excitation of these structures whereby the electric field is applied parallel to the plane of the multilayers. Compared to conventional electrical injection with current flowing normal to the plane of multilayers, this method has greatly improved the current density. Such structures are promising candidate as Si based light source for Si optoelectronics technology.