Critical analysis of short-term negative bias temperatureinstability measurements: Explaining the effect of time-zerodelay for on-the-fly measurements

Recently several groups have used the reaction-diffusion (R-D) model with H 2 diffusion in interpreting negative bias temperature Instability (NBTI) degradation. While the classical " H 2 R-D" model can interpret long-term NBTI behavior, it is inconsistent with short-term stress data obtai...

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Veröffentlicht in:Applied physics letters 2007-02, Vol.90 (8), p.083505-083505-3
Hauptverfasser: Islam, Ahmad Ehteshamul, Kufluoglu, Haldun, Varghese, Dhanoop, Alam, Muhammad Ashraful
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Zusammenfassung:Recently several groups have used the reaction-diffusion (R-D) model with H 2 diffusion in interpreting negative bias temperature Instability (NBTI) degradation. While the classical " H 2 R-D" model can interpret long-term NBTI behavior, it is inconsistent with short-term stress data obtained by recently developed ultrafast measurements and widely used on-the-fly measurements. Moreover, experimental data from various techniques are not consistent with each other. Here, the authors show that the H 2 R-D model must be generalized to consistently interpret NBTI at all time scales . The generalized model highlights the previously unappreciated role of time-zero delay in reconciling differences among the so-called delay-free on-the-fly measurements.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.2695998