Ion-induced electron emission from different crystalline phases of Zr O 2
A detailed study of Zr O 2 as a candidate material for a protective layer of plasma display panels has been performed. The ion-induced electron emission coefficient γ and the firing voltage were measured for cubic, tetragonal, and monoclinic Zr O 2 films. Different crystalline phases of Zr O 2 showe...
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| Veröffentlicht in: | Applied physics letters 2006-05, Vol.88 (21), p.211504-211504-3 |
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| Hauptverfasser: | , , , , , , , , , , , |
| Format: | Artikel |
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| Online-Zugang: | Volltext |
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| Zusammenfassung: | A detailed study of
Zr
O
2
as a candidate material for a protective layer of plasma display panels has been performed. The ion-induced electron emission coefficient
γ
and the firing voltage were measured for cubic, tetragonal, and monoclinic
Zr
O
2
films. Different crystalline phases of
Zr
O
2
showed a very small difference in the coefficient
γ
and the firing voltage. Compared to MgO, the coefficient
γ
was smaller and, as a result, the firing voltage was higher for
Zr
O
2
. |
|---|---|
| ISSN: | 0003-6951 1077-3118 |
| DOI: | 10.1063/1.2207495 |