Femtosecond pulsed laser direct write productionof nano- and microfluidic channels

Nano- and microfluidic channels were produced by selectively delaminating 1200 nm thermally grown oxide films ( Si O 2 ) films from Si(100) substrates using a femtosecond pulsed laser. Single pass channels exhibiting bell-like cross sections with widths of 24 μ m and heights of 355 nm were directly written at a speed of 1 cm ∕ s , while larger channels ( 320 μ m in width and ∼ 15 μ m in height) were produced by laterally overlapping single pass channels. The results of an investigation of the interior surfaces of the channels via atomic force microscopy and scanning electron microscopy are presented.