Implantation of labelled single nitrogen vacancy centersin diamond using N 15

Nitrogen-vacancy ( NV − ) color centers in diamond were created by implantation of 7 keV N 15 ( I = 1 ∕ 2 ) ions into type IIa diamond. Optically detected magnetic resonance was employed to measure the hyperfine coupling of single NV − centers. The hyperfine spectrum from NV − 15 arising from implanted N 15 can be distinguished from NV − 14 centers created by native N 14 ( I = 1 ) sites. Analysis indicates 1 in 40 implanted N 15 atoms give rise to an optically observable NV − 15 center. This report ultimately demonstrates a mechanism by which the yield of NV − center formation by nitrogen implantation can be measured.