Multilayer coating for 30.4 nm
A multilayer coating of Mo ∕ Si is usually used for space science in the spectral range of extreme ultraviolet, especially for He-II ( 30.4 nm ) radiation, because it is highly stable under vacuum and atmosphere. The fairly high reflectivity of 15%-20% is achieved. But the space science community ne...
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| Veröffentlicht in: | Review of scientific instruments 2005-06, Vol.76 (6), p.066109-066109-2 |
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| Hauptverfasser: | , , , |
| Format: | Artikel |
| Sprache: | eng |
| Online-Zugang: | Volltext |
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| Zusammenfassung: | A multilayer coating of
Mo
∕
Si
is usually used for space science in the spectral range of extreme ultraviolet, especially for He-II
(
30.4
nm
)
radiation, because it is highly stable under vacuum and atmosphere. The fairly high reflectivity of 15%-20% is achieved. But the space science community needs a higher reflective coating at
30.4
nm
for the future satellite missions. In this work, we report the design of a multilayer, consisting of a pair of Mg and SiC, and its fabrication, and result of the reflectance. |
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| ISSN: | 0034-6748 1089-7623 |
| DOI: | 10.1063/1.1938867 |