Lithium niobate ridge waveguides and modulators fabricatedusing smart guide
Ridge waveguides are fabricated using submicron thin films of lithium niobate prepared by crystal ion slicing and wafer bonding ("smart guide"). The waveguides are made by physical etching the lithium niobate thin film using ion beam milling. The waveguides are low loss. An electro-optic p...
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| Veröffentlicht in: | Applied physics letters 2005-04, Vol.86 (16), p.161115-161115-3 |
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| Hauptverfasser: | , |
| Format: | Artikel |
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| Online-Zugang: | Volltext |
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| Zusammenfassung: | Ridge waveguides are fabricated using submicron thin films of lithium niobate prepared by crystal ion slicing and wafer bonding ("smart guide"). The waveguides are made by physical etching the lithium niobate thin film using ion beam milling. The waveguides are low loss. An electro-optic polarization modulator with
V
π
L
of
15
V
cm
at
λ
=
1.55
μ
m
is demonstrated using the waveguides. |
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| ISSN: | 0003-6951 1077-3118 |
| DOI: | 10.1063/1.1906311 |