Hard x-ray microscopy with a 130 nm spatial resolution

Hard x-ray microscopy with a 130 nm spatial resolution

We have developed a new full field x-ray microscope at the beam line 1B2 of PLS (Pohang Light Source). It was designed to operate at the energy between 7 and 12 keV . High efficiency hard x-ray zone plates, condenser and objective, have been chosen as x-ray lenses. The spatial resolution of the micr...

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Veröffentlicht in:Review of scientific instruments 2005-02, Vol.76 (2), p.023702-023702-4
Hauptverfasser: Youn, Hwa Shik, Baik, Soo Yeun, Chang, Chang-Hwan
Format: Artikel
Sprache:eng
Schlagworte:
EFFICIENCY
HARD X RADIATION
INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY
KEV RANGE 01-10
KEV RANGE 10-100
LENSES
MICROSCOPES
MICROSCOPY
OPTICS
POHANG LIGHT SOURCE
SPATIAL RESOLUTION
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Beschreibung
Zusammenfassung:We have developed a new full field x-ray microscope at the beam line 1B2 of PLS (Pohang Light Source). It was designed to operate at the energy between 7 and 12 keV . High efficiency hard x-ray zone plates, condenser and objective, have been chosen as x-ray lenses. The spatial resolution of the microscope is better than 130 nm at 6.95 keV .
ISSN:0034-6748
1089-7623
DOI:10.1063/1.1841812