New getter pump for ultrahigh vacuum systems and transportable enclosure

We have developed a new type of nonevaporable getter (NEG) pump. It is based on the getter strip St707, produced by SAES getters S.p.A, fitted into a CF-flanged container. The pump is activated at 400° C for 1  h and its pumping behavior is studied for H 2 , CO , and N 2 . The pumping speed is about...

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Veröffentlicht in:Review of scientific instruments 2004-11, Vol.75 (11), p.4828-4832
Hauptverfasser: Firpo, G., Pozzo, A.
Format: Artikel
Sprache:eng
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Zusammenfassung:We have developed a new type of nonevaporable getter (NEG) pump. It is based on the getter strip St707, produced by SAES getters S.p.A, fitted into a CF-flanged container. The pump is activated at 400° C for 1  h and its pumping behavior is studied for H 2 , CO , and N 2 . The pumping speed is about 500  liters / s for H 2 , 230  liters / for CO , and 130  liters / s for N 2 , which is in good agreement with our theoretical pumping model. While its performance is similar to those of commercial NEG pumps, it is definitely more compact, inexpensive, and easy to use. When coupled with single-penning cell, our NEG pump can replace conventional ion pumps in the design of compact ultrahigh vacuum (UHV) systems. Its first application will be as an efficient and compact pumping device for portable UHV enclosure.
ISSN:0034-6748
1089-7623
DOI:10.1063/1.1809303