Electron Microprobe and Electron Diffraction Analysis of Surface Replica Extractions

Identical particle extraction, a new method for the microanalysis of contamination particles on surfaces or the identification of precipitates or particles in various matrixes, utilizes the extraction replica method and the identical area method. The principal advantage of this method is that the electron microprobe is used to obtain an elemental analysis of the identical particles from which electron diffraction patterns are obtained.