Modified Detection Arrangement for Scanning Electron Diffraction Instrument

Modified Detection Arrangement for Scanning Electron Diffraction Instrument

Modifications to the detection arrangement of a scanning electron diffraction apparatus, described by Grigson [Rev. Sci. Instr. 36, 1587 (1965)], have been carried out to (i) permit rejection of inelastically scattered electrons, (ii) provide measurements of the main beam by Faraday cage, and (iii)...

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Veröffentlicht in:Rev. Sci. Instrum., 37: 1687-9(Dec. 1966) 37: 1687-9(Dec. 1966), 1966-01, Vol.37 (12), p.1687-1689
Hauptverfasser: Dove, D. B., Denbigh, P. N.
Format: Artikel
Sprache:eng
Schlagworte:
ANALYSIS
CRYSTAL COUNTERS
DESIGN
DIFFRACTION
ELECTRONS
INSTRUMENTS
MEASUREMENT
N26100 -Instrumentation-Radiation Detection Instruments
RADIATION DETECTORS
SEMICONDUCTORS
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Beschreibung
Zusammenfassung:Modifications to the detection arrangement of a scanning electron diffraction apparatus, described by Grigson [Rev. Sci. Instr. 36, 1587 (1965)], have been carried out to (i) permit rejection of inelastically scattered electrons, (ii) provide measurements of the main beam by Faraday cage, and (iii) provide high sensitivity measurements using a semiconductor detector and modulated beam.
ISSN:0034-6748
1089-7623
DOI:10.1063/1.1720085