Improved ``Tuning'' of Ion Microprobes Using Scandium Thin Film Targets
The optical sensitivity of thin film scandium metal to energetic ions is used to observe and record the position, shape, and size of the primary beam of an ion microprobe during the beam tuning process. The tuning sample is also useful as an in situ gauge of the relative sputtering rate for various...
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| Veröffentlicht in: | Review of scientific instruments 1972-04, Vol.43 (4), p.654-655 |
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| Hauptverfasser: | , |
| Format: | Artikel |
| Sprache: | eng |
| Online-Zugang: | Volltext |
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| Zusammenfassung: | The optical sensitivity of thin film scandium metal to energetic ions is used to observe and record the position, shape, and size of the primary beam of an ion microprobe during the beam tuning process. The tuning sample is also useful as an in situ gauge of the relative sputtering rate for various beam types and energies. |
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| ISSN: | 0034-6748 1089-7623 |
| DOI: | 10.1063/1.1685715 |