Transmission Electron Microscopy with an ARL Microprobe

A method has been devised to permit a scanning transmitted electron image of the sample to be displayed in the ARL electron microprobe. This technique permits ultrathin sections prepared for electron microscopy to be transferred to the electron probe where the same area seen in the electron microscope can be easily found. Areas as small as 1 μ diam can then be accurately positioned under the stationary electron beam to permit elemental analysis of fine structures. The low sample current required (1 nA) permits good resolution of fine detail with no detectable damage to the specimen, thus leaving it intact for further electron microscopy. The determination of Ca/P molar ratios in a precipitate from a calcium phosphate solution is cited as an example of the method.