In situ manipulation and characterizations using nanomanipulators inside a field emission-scanning electron microscope

We have used two piezoelectric nanomanipulators to manage the multiwalled carbon nanotubes (MWCNTs) within the field emission-scanning electron microscope (FE-SEM). For an easy access of a tungsten tip to MWCNTs, we prepared the tungsten tip in sharp and long tip geometry using different electrochemical etching parameters. In addition, the sample stage was tilted by 45° from the normal direction of the surface to allow a better incident angle to the approaching tungsten tip. For manipulations, a nanotube or the bundles were attached at the tungsten tip using an electron beam-induced deposition (EBID). Using two manipulators, we have then fabricated a CNT-based transistor, a cross-junction of MWCNTs, and a CNT-attached atomic force microscopy tip. After these fabrications, the field emission properties of the MWCNT and junction properties of the MWCNT and the tungsten tip have been investigated. We found that the EBID approach was very useful to weld the nanostructured materials on the tungsten tip by simply irradiating the electron beam, although this sometimes increased the contact resistance by depositing hydrocarbon materials.